Miss.Soumya Purohit

Mr. Vishal

I am working on bulk micromachining of glass. Glass is a widely used material in MEMS technology. Glass shows high chemical stability, high transmission and high thermal stability. Due to which it is used in Bio – MEMS, Optical – MEMS and for packaging of MEMS devices such as RF MEMS, pressure sensors. Wet chemical etching is an effective method to form deep grooves and microfluidic channel on glass. Hydrofluoric acid (HF) is most used etchant of glass. My recent work is on study of wet chemical etching of glass in HF.

Miss. Priyanka

Mr. Vanlalrinfela

Mr. B. Sthya Sreenivas